Browsing by Author Lai, Teng-Hsien
Showing results 1 to 1 of 1
| Title | Author(s) | Source | Page(s) |
|---|---|---|---|
| Measurement of microstructure in micro electro mechanical systems using optical interferometric microscope | Lin, Chern-Sheng; Fu, Shu-Hsien; Yeh, Mau-Shiun; Tsou, Chingfu; Lai, Teng-Hsien | IJPAP Vol.50(09) [September 2012] | 641-649 |