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Title: Rapid surface roughness measurements of chromium carbon nitride hard films
Authors: Kuo, Chil-Chyuan
Huang, Po-Jenh
Keywords: Chromium carbon nitride;Surface roughness;Optical measurement
Issue Date: Aug-2012
Publisher: NISCAIR-CSIR, India
Abstract: Chromium carbon nitride (CrCN) hard films own high hardness, lower friction coefficient, higher wear and corrosion resistance. Investigations on the surface roughness of CrCN hard films become an important issue because the surface roughness of CrCN hard films is widely believed to be related to its characteristics of wear and corrosion resistances. This paper presents a low-cost optical inspection system for rapid surface roughness measurements of CrCN hard films. Surface roughness of hard films can be determined rapidly from the average value of the reflected direct current voltage by the developed optical system. The measurement results are in good agreement with the results of white-light interferometry measurements. The deviation between both approaches is less than 10.07%. The savings in measurement time of the surface roughness of hard films is up to 83%.
Page(s): 229-236
ISSN: 0975-1017 (Online); 0971-4588 (Print)
Appears in Collections:IJEMS Vol.19(4) [August 2012]

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