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http://nopr.niscpr.res.in/handle/123456789/1793Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hsieh, Kun-Lin | - |
| dc.date.accessioned | 2008-08-04T11:21:24Z | - |
| dc.date.available | 2008-08-04T11:21:24Z | - |
| dc.date.issued | 2008-07 | - |
| dc.identifier.issn | 0022-4456 | - |
| dc.identifier.uri | http://hdl.handle.net/123456789/1793 | - |
| dc.description | 505-511 | en_US |
| dc.description.abstract | This study presents applications of dimensional analysis (DA) and artificial neural networks (ANNs) for constructing model in many applications in chemistry, physics and mechanics. An illustrative example for spin coating of thin films in IC manufacturing is employed to demonstrate rationality and effectiveness of proposed approach. | en_US |
| dc.language.iso | en_US | en_US |
| dc.publisher | CSIR | en_US |
| dc.source | JSIR Vol.67(7) [July 2008] | en_US |
| dc.subject | Artificial neural networks | en_US |
| dc.subject | Dimensional analysis | en_US |
| dc.subject | Dimensionless terms | en_US |
| dc.subject | Function approximation | en_US |
| dc.title | Incorporating dimensional analysis and artificial neural networks into achieving process modeling in IC manufacturing | en_US |
| dc.type | Article | en_US |
| Appears in Collections: | JSIR Vol.67(07) [July 2008] | |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| JSIR 67(7) 505-511.pdf | 102.1 kB | Adobe PDF | View/Open |
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