Design and simulation of optimum piezoelectric MEMS microactuator for smart control applications

Abstract

This paper presents the design and finite element simulation of a novel piezoelectric microactuator. The optimaly designed cantilever type piezoelectric microactuator deflects at its tip by converse piezoelectric effect. It consists of a thin film PZT layer, intimately attached with a variable thickness SOI elastic layer and electrically connected with top and bottom electrodes by contact pads. The goal of this coupled piezoelectric actuator design is to multiply the force by adding a support beam, placed closer to the fixed end and by varying the width of the active layer. Structural simulation employed commercial software tool ANSYS/COVENTORWARE and the results include free tip deflection, blocked force and mechanical stresses while subjecting the actuator to a prescribed input voltage.