Enhancing the performance of MEMS pressure sensors using ‘v’-shaped piezoresistor-sensing elements

Abstract

In this paper, the structural designs of piezoresistor sensing elements are analyzed using finite element analysis (FEA) software CoventorWare® to gauge their effects on the sensing characteristics of pressure sensors. The structural designs of interest include variations on geometrical parameters and material substitution on critical portion of piezoresistor. Results obtained indicate that reduction of the upper to lower piezoresistor width ratio and material substitution on the interconnection portion substantially improves the sensitivity and linearity of micro pressure sensor.