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http://nopr.niscpr.res.in/handle/123456789/41043| Title: | Design Simulation and Analysis of U-Shaped and Rectangular MEMS Based Triple Coupled Cantilevers |
| Authors: | Siddaiah, N Manjusree, B Aditya, A L G N Reddy, D V Rama Koti |
| Keywords: | MEMS;Surface Stress;Eigen Frequency;Sensor;Triple Coupled Cantilever |
| Issue Date: | Apr-2017 |
| Publisher: | NISCAIR-CSIR, India |
| Abstract: | In this paper, we have proposed a new shape Micro-Electromechanical Systems (MEMS) based triple coupled Cantilever sensor, named as U-Shaped Cantilever. We have designed and simulated a U-Shaped MEMS based micro-cantilever made up of P-Silicon (Polycrystalline, Lightly doped) in COMSOL multiphysics. U-Shaped single beam Cantilever is designed with the dimensions of 100µm*20µm*2µm. U-shaped triple coupled Cantilever is designed with the dimensions of 20µm*120µm*2µm, 100µm*20µm*2µm. The simulation results like displacement, Eigen-frequency, surface stress, temperature, measurements of the U-shaped triple coupled cantilever is compared with rectangular triple coupled cantilever. |
| Page(s): | 235-238 |
| ISSN: | 0975-1084 (Online); 0022-4456 (Print) |
| Appears in Collections: | JSIR Vol.76(04) [April 2017] |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| JSIR 76(4) 235-238.pdf | 385.25 kB | Adobe PDF | View/Open |
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