A simple HPLC method for determination of 2-diazonaphthoquinone-5-sulphonic acid phenyl ester used in positive photoresists

Abstract

A simple high performance liquid chromatographic (HPLC) method for the determination of 2-diazonaphthoquinone-5-sulphonic acid phenyl ester (DNQ) is developed.<b style=""> </b>5-Amino naphthalene-1-sulphonic acid sodium salt is used as internal standard. A Polaris C18-5 <img src='/image/spc_char/micro.gif' border=0> silica column (250<img src='/image/spc_char/cross.gif' border=0>4.6 mm), 5 <img src='/image/spc_char/micro.gif' border=0> particle size, was equilibrated with a mobile phase composed of methanol and water (80:20, <i style="">v</i>/<i style="">v</i>). Flow rate was 1.0 mL/min. The elution time for 5-amino naphthalene-1-sulphonic acid sodium salt and DNQ was approximately 2 and 4 min, respectively. Calibration curve of DNQ<b style=""> </b>was linear in the concentration range of 10-50 <img src='/image/spc_char/micro.gif' border=0>g/mL. Limit of detection and quantification were measured in the lowest concentrations of the replicates. Recovery is about 96%.