Please use this identifier to cite or link to this item:
http://nopr.niscpr.res.in/handle/123456789/24362| Title: | Design of electron cyclotron resonance based reactive ion etching system |
| Authors: | Angra, S K Kumar, Parshant Bajpai, R P |
| Issue Date: | Aug-2001 |
| Publisher: | NISCAIR-CSIR, India |
| Abstract: | Designs of the subsystems of the Electron Cyclotron Resonance (ECR) plasma stream source at frequency 2.45 GHz are explored. The assembled machine on this design has been evaluated using Langmuir probe and etching of Si based compound. The plasma densities have been found to be above the critical value at this frequency and etching rates are compatible to the reported values. |
| Page(s): | 205-208 |
| ISSN: | 0975-1017 (Online); 0971-4588 (Print) |
| Appears in Collections: | IJEMS Vol.08(4) [August 2001] |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| IJEMS 8(4) 205-208.pdf | 910.59 kB | Adobe PDF | View/Open |
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