Gold coated YBCO films for room temperature FET -sensors

Abstract

<span style="font-size: 15.0pt;mso-bidi-font-size:8.0pt;font-family:" times="" new="" roman","serif""="">The thin films of high <span style="font-size:13.0pt;mso-bidi-font-size:6.0pt; font-family:HiddenHorzOCR;mso-hansi-font-family:" times="" new="" roman";mso-bidi-font-family:="" hiddenhorzocr"="">T_c <span style="font-size:15.0pt;mso-bidi-font-size: 8.0pt;font-family:" times="" new="" roman","serif""="">cuprates are sensitive to gases at room temperature and are highly suitable for development of silicon based FET -sensors. However, an appropriate passivation is needed for their incorporation in silicon-CMOS technology. Utilization of thin gold films for this purpose is reported here for the gas sensing properties of gold-coated YBCO films. RF magnetron sputtering is used to deposit YBCO films on oxidized silicon substrates. These films are then coated with a thin gold layer and used to construct discrete structures of capacitively controlled field effect transistor

<span style="font-size: 15.0pt;mso-bidi-font-size:8.0pt;font-family:" times="" new="" roman","serif""="">(CCFET) sensors to investigate their gas detection properties. The measurement technique and sensor response are discussed in detail. The results evince that gold-coated YBCO films are sensitive to ammonia at room temperature and can be employed as sensitive layer in integrated silicon-FET sensors for detection of ammonia.

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