Please use this identifier to cite or link to this item:
http://nopr.niscpr.res.in/handle/123456789/24408| Title: | Gold coated YBCO films for room temperature FET -sensors |
| Authors: | Gupta, R P Runthala, D P Paris, R Schipanski, D Vyas, P O |
| Issue Date: | Oct-2000 |
| Publisher: | NISCAIR-CSIR, India |
| Abstract: | The thin films of high Tc cuprates are sensitive to gases at room temperature and are highly suitable for development of silicon based FET -sensors. However, an appropriate passivation is needed for their incorporation in silicon-CMOS technology. Utilization of thin gold films for this purpose is reported here for the gas sensing properties of gold-coated YBCO films. RF magnetron sputtering is used to deposit YBCO films on oxidized silicon substrates. These films are then coated with a thin gold layer and used to construct discrete structures of capacitively controlled field effect transistor (CCFET) sensors to investigate their gas detection properties. The measurement technique and sensor response are discussed in detail. The results evince that gold-coated YBCO films are sensitive to ammonia at room temperature and can be employed as sensitive layer in integrated silicon-FET sensors for detection of ammonia. |
| Page(s): | 264-267 |
| Appears in Collections: | IJEMS Vol.07(5-6) [October-December 2000] |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| IJEMS 7(5-6) 264-267.pdf | 944.72 kB | Adobe PDF | View/Open |
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