Influence Factor Analysis of MEMS and IC Integration Technologies

Abstract

Microelectromechanical system (MEMS) devices are typically combined with integrated circuits (ICs) for operation in electronic systems. A variety of possible factors could affect the decisions of integrating MEMS and IC components. This paper aimed to investigate the critical influence factors of MEMS and IC integration technologies through expert interviews, and to further analyze their causal relationships based on fuzzy decision-making trial and evaluation laboratory (fuzzy DEMATEL) method. We found that product footprints and product costs are the two major influence dispatchers in the cause group, while fabrication complexity is the major influence receiver in the effect group. Moreover, signal path length has very little strength of influence on other factors. The research analysis of fuzzy DEMATEL method could serve as a reference to future development strategies in the field of MEMS and IC integration technologies.